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专任教师

季佩宇   校聘副教授
所在系室: 微电子学系
办公地点:
联系方式: 18806204459
研究方向: 1.低温等离子体源技术、放电诊断与应用 2. 等离子体与材料处理 3.半导体材料与器件

基本情况:

2021年获得苏州大学等离子体物理博士学位,主要研究方向低温等离子体源技术与应用。累计发表SCI收录论文30余篇,其中一作/通讯10余篇。主持国家自然科学基金青年基金(2024-2026)1项,参与国自然面上项目2项。


主讲课程:

 



主要成果

(1) P. Y Ji, J. L Chen, T.Y Huang, C.G Jin, L. J Zhuge, X. W,Fast preparation of vertical graphene nanosheets by helicon wave plasma chemical vapor deposition and its electrochemical performance,Diamond and Related Materials, 2020, 108, 107958

(2) P. Y Ji, J. L Chen, T.Y Huang, L. J Zhuge, X. M W, Hydrogen-modulated Ar/CH4 HWP-CVD for fast preparation of multi-wall carbon nanotube arrays with high specific capacitance, Diamond and Related Materials, 2020, 109, 108067

(3) P. Y Ji, J. L Chen, T.Y Huang, C.G Jin, L. J Zhuge, X. W, Effect of DC negative bias on microstructure and surface morphology of amorphous silicon carbide films prepared by HWP-CVD, Applied Physics A, 2020, 126, 247

(4) 季佩宇,黄天源,陈佳丽,诸葛兰剑,吴雪梅,螺旋波等离子体制备多种碳基薄膜原位诊断研究,物理学报,2021,70,09

(5) P. Y Ji, J. Yu, T.Y Huang, C.G Jin, Y. Yang, L. J Zhuge, X. M W,Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition, Plasma Science and Technology, 2018, 20, 025505.

(6) Yan Yang; Tianyuan Huang; Maoyang Li; Yaowei Yu; Jianjun Huang; Bin Yu; Xuemei Wu; Peiyu Ji ; The effect of nitrogen concentration on the properties of N-DLC prepared by helicon wave pla sma chemical vapor deposition, Plasma Science & Technology, 2022, 24(10): 105502-105502

(7) Peiyu Ji; Jiali Chen; Maoyang Li; Tianyuan Huang; lanjian Zhuge; Xuemei Wu ; Effect of ni trogen doping on the structure and electrochemical properties of vertical graphene sheets prepare d by HWP-CVD, Vacuum, 2023, 207